Femtosecond laser nanomachining of bulk fused silica

Pasquale Barbato; Roberto Osellame; Rebeca Martínez Vázquez

doi:10.1117/12.3000923

12 March 2024 Femtosecond laser nanomachining of bulk fused silica

Pasquale Barbato, Roberto Osellame, Rebeca Martínez Vázquez

Proceedings Volume 12875, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIV; 128750D (2024) https://doi.org/10.1117/12.3000923
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

Femtosecond laser irradiation followed by chemical etching in NaOH is a material processing technique capable of creating hollow channels with submicrometric cross-sections, extending up to a millimeter in length. In this study, we unveil the fabrication conditions leading to an effective nano-structuring of bulk fused silica, overcoming the limitations of traditional machining techniques in terms of both minimum achievable dimensions and high aspect ratios.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Pasquale Barbato, Roberto Osellame, and Rebeca Martínez Vázquez "Femtosecond laser nanomachining of bulk fused silica", Proc. SPIE 12875, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIV, 128750D (12 March 2024); https://doi.org/10.1117/12.3000923

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