Presentation + Paper
30 September 2024 Study on phase measurement uncertainty according to the number of phase shifting steps in a multiwavelength interferometer directly using optical comb modes
Author Affiliations +
Abstract
An electro-optic comb has a wide frequency mode spacing of more than several tens of GHz, making it possible to resolve each comb mode by using commercial spectrometers. The individual frequency modes of the electro-optic comb can be employed as the multiple stabilized lasers required for a multi-wavelength interferometer in absolute distance measurements. For absolute distance measurements, the phase information for each frequency mode, i.e., wavelength, is necessary for determining the absolute distance using the excess fraction method, and this requires a phase shifting process. Typically, the phase shifting is implemented through the sequential translation of a reference mirror by an equal distance. However, since the wavelength values corresponding to every frequency mode are different, even the same amount of shifting of the reference mirror generates different phase change for each wavelength. In such a situation, to accurately measure the phase for each wavelength, a model-based analysis method for phase shifting intensity signals itself was adopted. In the model-based analysis of phase shifting intensity signals, the phase determination uncertainty can vary depending on the number of the phase shifting step. Therefore, in this study, we aim to estimate the phase determination uncertainty according to the number of the phase shifting step through numerical simulations.
Conference Presentation
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
J. Park, Y.-S. Jang, and J. Jin "Study on phase measurement uncertainty according to the number of phase shifting steps in a multiwavelength interferometer directly using optical comb modes", Proc. SPIE 13134, Optical Manufacturing and Testing 2024, 1313406 (30 September 2024); https://doi.org/10.1117/12.3026862
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Phase shifting

Phase measurement

Measurement uncertainty

Model based design

Interferometers

Data modeling

Distance measurement

RELATED CONTENT

High accuracy absolute distance metrology
Proceedings of SPIE (November 21 2017)
Low-coherence vibration insensitive Fizeau interferometer
Proceedings of SPIE (August 14 2006)
Homogeneity measurement using an infrared interferometer
Proceedings of SPIE (October 03 1996)
Absolute Distance Interferometry
Proceedings of SPIE (March 23 1987)

Back to Top