Paper
1 July 1991 Virtual-phase charge-coupled device image sensors for industrial and scientific applications
Alexander T. Khvilivitzky, V. Yu. Berezin, Leonid Yu. Lazovsky, S. S. Tataurschikov, A. N. Pisarevsky, Michail G. Vydrevitch, Vladimir G. Kossov
Author Affiliations +
Abstract
A family of VP CCD image sensors for different industrial and scientific applications was designed, fabricated, and tested. All of them share the common concept of a 2.5-phase photosensitive cell, combining the advantages of known 1.5-phase VP devices (reduced dark current and increased quantum efficiency) with simpler fabrication process and extended functions.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander T. Khvilivitzky, V. Yu. Berezin, Leonid Yu. Lazovsky, S. S. Tataurschikov, A. N. Pisarevsky, Michail G. Vydrevitch, and Vladimir G. Kossov "Virtual-phase charge-coupled device image sensors for industrial and scientific applications", Proc. SPIE 1447, Charge-Coupled Devices and Solid State Optical Sensors II, (1 July 1991); https://doi.org/10.1117/12.45339
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KEYWORDS
Charge-coupled devices

Electrodes

CCD image sensors

Quantum efficiency

Clocks

Diffusion

Manufacturing

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