Bump-bonded back-illuminated CCDs

Michael P. Lesser; Ann Bauer; Lee Ulrickson; David B. Ouellette

doi:10.1117/12.135929

12 August 1992 Bump-bonded back-illuminated CCDs

Michael P. Lesser, Ann Bauer, Lee Ulrickson, David B. Ouellette

Proceedings Volume 1656, High-Resolution Sensors and Hybrid Systems; (1992) https://doi.org/10.1117/12.135929
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

We have developed a thinning and packaging process which allows the conversion of front-illuminated charge-coupled devices (CCDs) into back illuminated sensors. This process does not depend on any special processing by the manufacturer and can therefore be used with any type of CCD. The process consists of several major steps which include: 1) making a silicon substrate with conductive traces and indium bumps which mate to the CCD wire bonding pads 2) placing indium bumps on the CCD wire bonding pads 3) bump bonding the substrate and CCD together 4) thinning 5)packaging 6) oxidizing the backside surface 7) applying antireflection coatings and 8) backside charging. Using this process with Loral 1200x800 and 3072x1024 CCDs we have produced devices with quantum efficiency in excess of 80 in the near-UV and visible wavelength regions. The surface flatness of these devices has been measured interferometrically to deviate from a plane by less than 1 um rms for the 1200x800 pixel sensors. 2.

Citation Download Citation

Michael P. Lesser, Ann Bauer, Lee Ulrickson, and David B. Ouellette "Bump-bonded back-illuminated CCDs", Proc. SPIE 1656, High-Resolution Sensors and Hybrid Systems, (12 August 1992); https://doi.org/10.1117/12.135929

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available