Measurement of 2D birefringence distribution

Masato Noguchi; Tsuyoshi Ishikawa; Masahiro Ohno; Satoru Tachihara

doi:10.1117/12.132143

20 October 1992 Measurement of 2D birefringence distribution

Masato Noguchi, Tsuyoshi Ishikawa, Masahiro Ohno, Satoru Tachihara

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132143
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A new measuring method of 2-D birefringence distribution has been developed. It has not been an easy job to get a birefringence distribution in an optical element with conventional ellipsometry because of its lack of scanning means. Finding an analogy between the rotating analyzer method in ellipsometry and the phase-shifting method in recently developed digital interferometry, we have applied the phase-shifting algorithm to ellipsometry, and have developed a new method that makes the measurement of 2-D birefringence distribution easy and possible. The system contains few moving parts, assuring reliability, and measures a large area of a sample at one time, making the measuring time very short.

Citation Download Citation

Masato Noguchi, Tsuyoshi Ishikawa, Masahiro Ohno, and Satoru Tachihara "Measurement of 2D birefringence distribution", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132143

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