Scattering characteristics of dielectric optical multilayers in visible region

Takayuki Akiyama

doi:10.1117/12.132121

20 October 1992 Scattering characteristics of dielectric optical multilayers in visible region

Takayuki Akiyama

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132121
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A scattering measurement apparatus equipped with a halogen lamp and an integrating sphere was constructed. The scattering characteristics of ZrO₂/SiO₂ multilayers were measured in the visible region. The scattering characteristics did not only follow (lambda) ^-4 relation but also depended on the optical characteristics. It was shown that the electric field intensity distributions qualitatively explained the scattering characteristics. Also, the apparatus was useful as an instrument to find out the optimum deposition conditions of multilayers.

Citation Download Citation

Takayuki Akiyama "Scattering characteristics of dielectric optical multilayers in visible region", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132121

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