Nonspecular scattering from multilayer mirrors at normal incidence

Eric M. Gullikson; Daniel Gorman Stearns; David P. Gaines; James H. Underwood

doi:10.1117/12.278882

11 July 1997 Nonspecular scattering from multilayer mirrors at normal incidence

Eric M. Gullikson, Daniel Gorman Stearns, David P. Gaines, James H. Underwood

Proceedings Volume 3113, Grazing Incidence and Multilayer X-Ray Optical Systems; (1997) https://doi.org/10.1117/12.278882
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The first measurements are reported of non-specular scattering of EUV radiation normally incident on a multilayer mirror. The scattering from a Mo/Si multilayer mirror has been measured as a function of angle and wavelength. A peak in the angular distribution of scattered light is observed which is due to the correlation of the roughness of different interfaces. The scattering from correlated roughness can be described by a simple kinematic theory of scattering. In the region of the Bragg reflectivity peak dynamical effects lead to a reduction in the scattering from the simple kinematic theory. The total integrated scatter (TIS) has been measured and is found to peak on the short wavelength side of the Bragg peak. The TIS is less than 1% of the incident intensity.

Citation Download Citation

Eric M. Gullikson, Daniel Gorman Stearns, David P. Gaines, and James H. Underwood "Nonspecular scattering from multilayer mirrors at normal incidence", Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); https://doi.org/10.1117/12.278882

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