Electrolytic gate for quantum efficiency enhancement in thinned CCDs

Michael A. Damento; Mary Watson; Gary R. Sims

doi:10.1117/12.148599

12 July 1993 Electrolytic gate for quantum efficiency enhancement in thinned CCDs

Michael A. Damento, Mary Watson, Gary R. Sims

Proceedings Volume 1900, Charge-Coupled Devices and Solid State Optical Sensors III; (1993) https://doi.org/10.1117/12.148599
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States

Abstract

A transparent, semi-solid, electrolytic gate has been applied to the backside of thinned CCDs for quantum efficiency enhancement. The gate is applied by spreading a water solution of phosphoric acid and polyvinyl alcohol onto the silicon and drying it to form a thin plastic film. When a negative voltage of less than one volt with respect to substrate ground is applied to the gate, a QE pinned condition (100% internal quantum efficiency) is produced. An insulating layer is not needed with this gate (as it is with electronic conductors) since a threshold voltage of about 1.2 V is required before conduction into the silicon can occur. The mechanism of charging is believed to involve a pile-up of negative ions at the silicon-electrolyte interface which compensates for the positive oxide charge. Conduction into the silicon at low voltages is restricted by the oxidation potential of the negative ions in the electrolyte.

Citation Download Citation

Michael A. Damento, Mary Watson, and Gary R. Sims "Electrolytic gate for quantum efficiency enhancement in thinned CCDs", Proc. SPIE 1900, Charge-Coupled Devices and Solid State Optical Sensors III, (12 July 1993); https://doi.org/10.1117/12.148599

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available