Application of the Fourier transform in a preliminary analysis of the reflectivity curve obtained by grazing x-ray reflectometry

Francoise Bridou; Bruno Pardo

doi:10.1117/12.192143

4 November 1994 Application of the Fourier transform in a preliminary analysis of the reflectivity curve obtained by grazing x-ray reflectometry

Francoise Bridou, Bruno Pardo

Author Affiliations +

Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192143
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France

Abstract

Grazing X-ray reflectometry allows the analysis of thin layer stacks. The fitting of the reflectivity curve by a trial and error method can be used in order to determine the parameters of the films. In order to facilitate this trial and error method, the Fourier transforms of the Grazing X-ray reflectivity curves have been investigated. After the appropriate transformation of the original reflectivity curve in order to make the signal periodic, rough values of the thicknesses can be found. In first approximation, the Fourier transform leads to the auto correlation function of the derivative of the index profile of the stack. The spectrum can give also rough information about roughness by the widening of the peaks, and the height of the peaks are related to the contrast of the indices. The number of peaks in the spectrum is a function of the number of interfaces in the stack. It is shown how one can use the Fourier transform results to make a preliminary stack model before fitting the experimental data.

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Francoise Bridou and Bruno Pardo "Application of the Fourier transform in a preliminary analysis of the reflectivity curve obtained by grazing x-ray reflectometry", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192143

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