High-reflectance coatings and materials for the extreme ultraviolet

Ritva A. M. Keski-Kuha; John F. Osantowski; Gerry M. Blumenstock; Jeffrey S. Gum; Charles M. Fleetwood; Douglas B. Leviton; Timo T. Saha; John G. Hagopian; June L. Tveekrem; Geraldine A. Wright

doi:10.1117/12.213712

14 July 1995 High-reflectance coatings and materials for the extreme ultraviolet

Ritva A. M. Keski-Kuha, John F. Osantowski, Gerry M. Blumenstock, Jeffrey S. Gum, Charles M. Fleetwood, Douglas B. Leviton, Timo T. Saha, John G. Hagopian, June L. Tveekrem, Geraldine A. Wright

Author Affiliations +

Proceedings Volume 2428, Laser-Induced Damage in Optical Materials: 1994; (1995) https://doi.org/10.1117/12.213712
Event: Laser-Induced Damage in Optical Materials: 1994, 1994, Boulder, CO, United States

Abstract

Advances in optical coating and materials technology have made possible the development of instruments with substantially improved efficiency in the extreme ultraviolet/far ultraviolet (EUV/FUV) spectral region. For example, the development of chemical vapor deposited (CVD) SiC mirrors provides an opportunity to extend the range of normal incidence instruments down to 60 nm. The EUV performance and some applications of optical coatings including MgG₂ protected aluminum, CVD- SiC, SiC films, boron carbide films, and multilayer coatings will be discussed. Contamination sensitivity and cleaning will be addressed.

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Ritva A. M. Keski-Kuha, John F. Osantowski, Gerry M. Blumenstock, Jeffrey S. Gum, Charles M. Fleetwood, Douglas B. Leviton, Timo T. Saha, John G. Hagopian, June L. Tveekrem, and Geraldine A. Wright "High-reflectance coatings and materials for the extreme ultraviolet", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213712

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