High-resolution multigas sensors based on solid state resonant cavities

Fernando Lopez; Jesus Meneses; Juan Melendez; Antonio J. de Castro; Angel Munoz

doi:10.1117/12.231021

5 February 1996 High-resolution multigas sensors based on solid state resonant cavities

Fernando Lopez, Jesus Meneses, Juan Melendez, Antonio J. de Castro, Angel Munoz

Proceedings Volume 2730, Second Iberoamerican Meeting on Optics; (1996) https://doi.org/10.1117/12.231021
Event: Second Iberoamerican Meeting on Optics, 1995, Guanajuato, Mexico

Abstract

A new sensor is proposed combining arrays of interference filters with resonant cavities of high interference order (Fabry-Perot resonators) using both, high capabilities of accurate thickness control in silicon substrates derived from microelectronics and thin-film optics techniques. The interest of this type of device would be the fabrication of high resolution multigas sensors, compact, with no moving parts, for accurate measurement of low concentration gases.

Citation Download Citation

Fernando Lopez, Jesus Meneses, Juan Melendez, Antonio J. de Castro, and Angel Munoz "High-resolution multigas sensors based on solid state resonant cavities", Proc. SPIE 2730, Second Iberoamerican Meeting on Optics, (5 February 1996); https://doi.org/10.1117/12.231021

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