Linearity of capacitance micrometry

Malachy McConnell; Thomas R. Hicks; Paul D. Atherton

doi:10.1117/12.259036

20 November 1996 Linearity of capacitance micrometry

Malachy McConnell, Thomas R. Hicks, Paul D. Atherton

Proceedings Volume 2865, Actuator Technology and Applications; (1996) https://doi.org/10.1117/12.259036
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Capacitance micrometry is a technique for measuring the relative displacement of two surfaces. As the spacing between the two surfaces changes so the capacitance changes. This short paper is a summary of recent measurements made to characterize and understand the linearity and scale factor.

Citation Download Citation

Malachy McConnell, Thomas R. Hicks, and Paul D. Atherton "Linearity of capacitance micrometry", Proc. SPIE 2865, Actuator Technology and Applications, (20 November 1996); https://doi.org/10.1117/12.259036

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