Modeling of a filamental discharge formation and development in ArF excimer laser

Haruaki Akashi; Yosuke Sakai; Hiroaki Tagashira; Nobuaki Takahashi; Tai Sasaki

doi:10.1117/12.273667

2 May 1997 Modeling of a filamental discharge formation and development in ArF excimer laser

Haruaki Akashi, Yosuke Sakai, Hiroaki Tagashira, Nobuaki Takahashi, Tai Sasaki

Proceedings Volume 2989, Modeling and Simulation of Higher-Power Laser Systems IV; (1997) https://doi.org/10.1117/12.273667
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Dynamics of a constricted filamental discharge in a discharge- excited ArF excimer laser have been examined using a two dimensional fluid model. An entire process of the filamental discharge, from its initiation and development to extinction, is shown. The filamental discharge is triggered at protrusions which would always exist on cathode surfaces, and develops in the direction of the anode assisted by the high field induced by space charge. The gas temperature in the filamental discharge in the vicinity of the cathode is found to rise. This temperature is shown to play an important role in development of the filamental discharge. The effect of preionization electron density n_e0 is also examined, and significant development of the filamental discharge toward the anode is seen when the n_e0 becomes lower. The results are examined properly in connection with experimental observations.

Citation Download Citation

Haruaki Akashi, Yosuke Sakai, Hiroaki Tagashira, Nobuaki Takahashi, and Tai Sasaki "Modeling of a filamental discharge formation and development in ArF excimer laser", Proc. SPIE 2989, Modeling and Simulation of Higher-Power Laser Systems IV, (2 May 1997); https://doi.org/10.1117/12.273667

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