Fabrication issues of oxide-confined VCSELs

Kent M. Geib; Kent D. Choquette; Hong Q. Hou; B. Eugene Hammons

doi:10.1117/12.271054

4 April 1997 Fabrication issues of oxide-confined VCSELs

Kent M. Geib, Kent D. Choquette, Hong Q. Hou, B. Eugene Hammons

Proceedings Volume 3003, Vertical-Cavity Surface-Emitting Lasers; (1997) https://doi.org/10.1117/12.271054
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

To insert high performance oxide-confined vertical-cavity surface-emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, the sample temperature, the carrier gas flow and the bubbler water temperature. Knowledge of these critical parameters has enabled the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for Al_xGa_1-xAs layers of x equals 1.00, 0.98 and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively.

Citation Download Citation

Kent M. Geib, Kent D. Choquette, Hong Q. Hou, and B. Eugene Hammons "Fabrication issues of oxide-confined VCSELs", Proc. SPIE 3003, Vertical-Cavity Surface-Emitting Lasers, (4 April 1997); https://doi.org/10.1117/12.271054

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