G-performance characterization of surface-micromachined FDDI optical bypass switches

Shi-sheng Lee; M. Edward Motamedi; Ming C. Wu

doi:10.1117/12.284575

2 September 1997 G-performance characterization of surface-micromachined FDDI optical bypass switches

Shi-sheng Lee, M. Edward Motamedi, Ming C. Wu

Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284575
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

We report the experimental g-performance characterization of surface-micromachined FDDI (fiber distributed data interface) optical bypass switches. Novel surface-micromachined FDDI optical bypass switch consists of an out-of-plane micromirror is driven by integrated scratch drive actuators, and balanced by a spring. A pull-back spring is integrated with the switch in order to satisfy the requirements for the fail-safe feature of the FDDI optical bypass switch. We have performed the vibration test of the switch in collaboration with Rockwell Science Center. The purpose of this test is to investigate the robustness of the surface-micromachined fib optic switch against external vibrations. Error-free operation up to 89s (equipment-limited) was observed for vibration frequencies from 200 Hz to 10 kHz. Comparison of the receiving sensitivity with and without vibration shows that there is virtually no effect of vibration of this scale. No mechanical failure observed throughout the entire test.

Citation Download Citation

Shi-sheng Lee, M. Edward Motamedi, and Ming C. Wu "G-performance characterization of surface-micromachined FDDI optical bypass switches", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); https://doi.org/10.1117/12.284575

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