Dr. M. Edward Motamedi Profile

Dr. M. Edward Motamedi

Retired

SPIE Involvement:

Track Chair | Author | Editor | Instructor

Publications (29)

SPIE Journal Paper | 21 March 2014 Open Access

Special Section Guest Editorial: Emerging MOEMS Technology and Applications

M. Edward Motamedi, Joel Kubby, Patrick Oden, Wibool Piyawattanametha

JM3, Vol. 13, Issue 01, 011101, (March 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011101

KEYWORDS: Microopto electromechanical systems, Microelectromechanical systems, Micro optics, Mirrors, Photonics, Technologies and applications, Digital micromirror devices, Microsystems, Actuators

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SPIE Journal Paper | 1 October 2005 Open Access

Editorial: MOEMS: Design, Technology, and Applications

M. Edward Motamedi

JM3, Vol. 4, Issue 04, 041201, (October 2005) https://doi.org/10.1117/12.10.1117/1.2118627

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SPIE Press Book | 21 April 2005

MOEMS: Micro-Opto-Electro-Mechanical Systems

KEYWORDS: Actuators, Mirrors, Microelectromechanical systems, Microopto electromechanical systems, Sensors, Silicon, Microlens, Micromirrors, Magnetism

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MOEMS: Micro-Opto-Electro-Mechanical Systems

Proceedings Article | 18 August 2000 Paper

Micro-optics development in the past decade

Haluk Sankur, M. Edward Motamedi

Proceedings Volume 4179, (2000) https://doi.org/10.1117/12.395678

KEYWORDS: Microlens, Micro optics, Microlens array, Diffraction, Photomasks, Photoresist materials, Fabrication, Liquid crystals, Transformers, Sensors

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Proceedings Article | 3 September 1999 Paper

Tunneling tip engine for microsensors applications

M. Edward Motamedi, Sangtae Park, Angus Andrews, Mohsen Khoshnevisan

Proceedings Volume 3875, (1999) https://doi.org/10.1117/12.360471

KEYWORDS: Sensors, Electrodes, Photomasks, Semiconducting wafers, Silicon, Etching, Infrared sensors, Microsensors, Feedback signals, Indium

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Proceedings Article | 2 September 1998 Paper

Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches

Long-Sun Huang, Shi-sheng Lee, M. Edward Motamedi, Ming Wu, Chang-Jin Kim

Proceedings Volume 3513, (1998) https://doi.org/10.1117/12.324267

KEYWORDS: Mirrors, Switches, Microelectromechanical systems, Gold, Packaging, Silicon, Fiber couplers, Fiber optics, Local area networks, Electrodes

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Proceedings Article | 2 September 1998 Paper

Characterization of micro-opto-electro-mechanical devices

Mahyar Dadkhah, Amit Burstein, M. Edward Motamedi, Sangtae Park

Proceedings Volume 3513, (1998) https://doi.org/10.1117/12.324278

KEYWORDS: Actuators, Finite element methods, Silicon, Device simulation, Microelectromechanical systems, Signal detection, Chemical elements, Electronics, 3D modeling, Process modeling

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Proceedings Article | 22 June 1998 Paper

Surface micromachined devices for microwave and photonic applications

M. Chang, Ming Wu, JeyHsin Yao, M. Edward Motamedi

Proceedings Volume 3419, 34190S (1998) https://doi.org/10.1117/12.311012

KEYWORDS: Microwave radiation, Microwave photonics, Photonic microstructures, Microelectromechanical systems, Microopto electromechanical systems

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Proceedings Article | 15 March 1998 Paper

Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion

Massood Tabib-Azar, Boonsong Sutapun, M. Edward Motamedi

Proceedings Volume 3276, (1998) https://doi.org/10.1117/12.302406

KEYWORDS: Actuators, Microopto electromechanical systems, Prototyping, Microelectromechanical systems, Optical scanning, Microfluidics, Scanners, Micromachining, Microactuators, Ultrasonics

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Proceedings Article | 15 March 1998 Paper

MOEM scan engine for bar code reading and factory automation

M. Edward Motamedi, Sangtae Park, Robert Melendes, A. Wang, Angus Andrews, Dawn Garcia-Nunez, Dan Jinar, Patti Richardson, J. Studer, J. Chen, Jeffrey DeNatale, Jeffrey Moranski

Proceedings Volume 3276, (1998) https://doi.org/10.1117/12.302410

KEYWORDS: Scanners, Mirrors, Microopto electromechanical systems, Actuators, Silicon, Oxides, Metals, Optical scanning, Etching, Electronics

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Proceedings Article | 2 September 1997 Paper

G-performance characterization of surface-micromachined FDDI optical bypass switches

Shi-sheng Lee, M. Edward Motamedi, Ming Wu

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284575

KEYWORDS: Switches, Local area networks, Integrated optics, Interfaces, Micromirrors, Actuators

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SPIE Journal Paper | 1 May 1997

Micro-optic integration with focal plane arrays

M. Edward Motamedi, William Tennant, Haluk Sankur, Robert Melendes, Natalie Gluck, Sangtae Park, Jose Arias, Jagmohan Bajaj, John Pasko, William McLevige, Majid Zandian, Randolph Hall, Karla Steckbauer, Patti Richardson

OE, Vol. 36, Issue 05, (May 1997) https://doi.org/10.1117/12.10.1117/1.601347

KEYWORDS: Microlens, Photoresist materials, Sensors, Diodes, Microlens array, Micro optics, Diffraction, Thin films, Staring arrays, Quantum efficiency

SPIE Journal Paper | 1 May 1997

Development of micro-electro-mechanical optical scanner

M. Edward Motamedi, Sangtae Park, A. Wang, Mahyar Dadkhah, Angus Andrews, Henry Marcy, Mohsen Khoshnevisan, Arthur Chiou, R. Huhn, C. Sell, Johannes Smits

OE, Vol. 36, Issue 05, (May 1997) https://doi.org/10.1117/12.10.1117/1.601357

KEYWORDS: Scanners, Optical scanning, Mirrors, Actuators, Metals, Microelectromechanical systems, Silicon, Microactuators, Composites, Semiconductor lasers

SPIE Journal Paper | 1 May 1997

Micro-opto-electro-mechanical devices and on-chip optical processing

M. Edward Motamedi, Ming Wu, Kristofer Pister

OE, Vol. 36, Issue 05, (May 1997) https://doi.org/10.1117/12.10.1117/1.601356

KEYWORDS: Microlens, Microelectromechanical systems, Mirrors, Optical signal processing, Switches, Digital micromirror devices, Fabry–Perot interferometers, Microlens array, Photoresist materials, Micro optics

SPIE Journal Paper | 1 May 1997 Open Access

Guest Editorial: Special Section on Micro-Opto-Electro-Mechanical Systems

M. Edward Motamedi

OE, Vol. 36, Issue 05, (May 1997) https://doi.org/10.1117/12.10.1117/1.601329

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Proceedings Article | 11 April 1997 Paper

Optical transformer and collimator for efficient fiber coupling

M. Edward Motamedi, Haluk Sankur, Frederic Durville, William Southwell, Robert Melendes, Xiaomei Wang, Charlie Liu, Robert Rediker, Mohsen Khoshnevisan

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271412

KEYWORDS: Transformers, Collimators, Microlens, Lenses, Semiconducting wafers, Photoresist materials, Optical design, Microlens array, Diffraction, Photomasks

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Proceedings Article | 23 September 1996 Paper

On-chip optical processing

M. Edward Motamedi, Ming Wu, Kristofer Pister

Proceedings Volume 2881, (1996) https://doi.org/10.1117/12.251259

KEYWORDS: Microlens, Microelectromechanical systems, Mirrors, Switches, Digital micromirror devices, Diffraction, Photoresist materials, Microlens array, Fabry–Perot interferometers, Optical signal processing

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Proceedings Article | 8 March 1996 Paper

FPAs and thin film binary optic microlens integration

M. Edward Motamedi, William Tennant, Robert Melendes, Natalie Gluck, Sangtae Park, Jose Arias, Jagmohan Bajaj, John Pasko, William McLevige, Majid Zandian, Randolph Hall, Karla Steckbauer, Patti Richardson, Donald Cooper

Proceedings Volume 2687, (1996) https://doi.org/10.1117/12.234638

KEYWORDS: Microlens, Diffraction, Sensors, Thin films, Diodes, Microlens array, Photoresist materials, Photomasks, Quantum efficiency, Lenses

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The relatively large detector size of conventional focal plane arrays often acts as a limiting source of noise currents and requires these devices to run at undesirably low temperatures. To reduce the detector size without reducing the detector's quantum efficiency, we have developed efficient on-focal plane collection optics consisting of arrays of thin film binary optic microlenses on the back surface of hybrid detector array structures. P/n polarity photodiodes of an unusual `planar-mesa' geometry were fabricated in epitaxial HgCdTe deposited by molecular beam epitaxy on the `front' side of a CdZnTe substrate. Diffractive (8 - 16 phase level) Ge microlenses were deposited on 48 micrometers centers in a registered fashion (using an IR mask aligner and appropriate marks on the front surface of the CdZnTe) on the back side of the substrate using a lifting process. The lifting process circumvents some of the process limitations of the more conventional chemical etching method to diffractive microlens processing, allowing them to approach more closely their theoretical efficiency limit of > 95%. Prior to microlens deposition, but after diode fabrication, the test structures were flip- chip bonded or `hybridized' using indium interconnections to metallic strip lines which had been photolithographically deposited on sapphire dice (a process equally compatible with a silicon integrated circuit readout). After hybridization, the CdZnTe was thinned to equal the focal length of the lenses in the CdZnTe material. Optical characterization has demonstrated that the microlenses combined with the detector mesas concentrate light sufficiently to increase the effective collection area. The optical size of the mesa detectors being larger than the theoretical diffraction limit of the microlenses precludes determining whether the lenses themselves produce the theoretical diffraction-limited gain, but they clearly decrease required detector area by at least 3 - 6X. To our knowledge, this is the first successful demonstration of IR detectors and binary optics microlens integration.

Proceedings Article | 8 March 1996 Paper

Fabrication of microlens arrays by reactive ion milling

Haluk Sankur, Randolph Hall, M. Edward Motamedi, William Gunning, William Tennant

Proceedings Volume 2687, (1996) https://doi.org/10.1117/12.234628

KEYWORDS: Ions, Photoresist materials, Microlens, Microlens array, Oxygen, Argon, Infrared materials, Etching, Zinc, Silicon

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Proceedings Article | 12 May 1995 Paper

Silicon micromachined piezoelectric ZnO bimorphs as micromirrors for display applications

Johannes Smits, Wai-Shing Choi, M. Edward Motamedi, Angus Andrews

Proceedings Volume 2383, (1995) https://doi.org/10.1117/12.209045

KEYWORDS: Zinc oxide, Micromirrors, Silicon, Chemical elements, Electrodes, Gold, Etching, Semiconducting wafers, Composites, Capacitance

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Proceedings Article | 12 May 1995 Paper

Fabrication of refractive microlens arrays

Haluk Sankur, M. Edward Motamedi, Randolph Hall, William Gunning, Mohsen Khoshnevisan

Proceedings Volume 2383, (1995) https://doi.org/10.1117/12.209019

KEYWORDS: Etching, Photoresist materials, Microlens, Microlens array, Reactive ion etching, Silica, Lenses, Silicon, Solids, Germanium

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SPIE Journal Paper | 1 November 1994

Micro-opto-electro-mechanical systems

M. Edward Motamedi

OE, Vol. 33, Issue 11, (November 1994) https://doi.org/10.1117/12.10.1117/12.181572

KEYWORDS: Microlens, Microelectromechanical systems, Diffraction, Micro optics, Microlens array, Microopto electromechanical systems, Sensors, Actuators, Photoresist materials, Silicon

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SPIE Journal Paper | 1 November 1994

Miniaturized micro-optical scanners

M. Edward Motamedi, Angus Andrews, William Gunning, Mohsen Khoshnevisan

OE, Vol. 33, Issue 11, (November 1994) https://doi.org/10.1117/12.10.1117/12.181574

KEYWORDS: Microlens array, Microlens, Diffraction, Scanners, Actuators, Beam steering, Telecommunications, Transducers, Laser scanners, Geometrical optics

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Proceedings Article | 28 December 1993 Paper

Merging micro-optics with micromechanics: micro-opto-electro-mechanical (MOEM) devices

M. E. Motamedi

Proceedings Volume 10271, 102710G (1993) https://doi.org/10.1117/12.170189

KEYWORDS: Micro optics, Microopto electromechanical systems, Microelectromechanical systems, Microlens, Integrated circuits, Optical design, Integrated optics, Infrared radiation, Staring arrays, Beam splitters

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Proceedings Article | 15 December 1993 Paper

Micro-optic laser beam scanner

M. Edward Motamedi, Angus Andrews, William Gunning, Mohsen Khoshnevisan

Proceedings Volume 1992, (1993) https://doi.org/10.1117/12.165688

KEYWORDS: Microlens, Microlens array, Diffraction, Beam steering, Scanners, Micro optics, Actuators, Laser scanners, 3D scanning, Geometrical optics

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Proceedings Article | 13 January 1993 Paper

Optical testing and characterization of mirolens arrays

Leonard Hale, M. Edward Motamedi, William Gunning

Proceedings Volume 1751, (1993) https://doi.org/10.1117/12.138904

KEYWORDS: Microlens, Diffraction, Point spread functions, Thin films, Modulation transfer functions, Microlens array, Optical testing, Imaging systems, Quartz, Lenses

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Proceedings Article | 13 January 1993 Paper

Binary optics thin-film microlens array

M. Edward Motamedi, Robert Anderson, R. de la Rosa, Leonard Hale, William Gunning, Randolph Hall, Mohsen Khoshnevisan

Proceedings Volume 1751, (1993) https://doi.org/10.1117/12.138890

KEYWORDS: Diffraction, Microlens, Microlens array, Thin films, Photoresist materials, Photomasks, Image processing, Etching, Sapphire, Lithography

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Proceedings Article | 1 November 1991 Paper

High-speed binary optic microlens array in GaAs

M. Edward Motamedi, William Southwell, Robert Anderson, Leonard Hale, William Gunning, Michael Holz

Proceedings Volume 1544, (1991) https://doi.org/10.1117/12.49371

KEYWORDS: Microlens, Diffraction, Microlens array, Gallium arsenide, Photomasks, Semiconducting wafers, Monochromatic aberrations, Micro optics, Staring arrays, Reactive ion etching

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Proceedings Article | 1 November 1991 Paper

Silicon microlenses for enhanced optical coupling to silicon focal planes

M. Edward Motamedi, Marsden Griswold, Robert Knowlden

Proceedings Volume 1544, (1991) https://doi.org/10.1117/12.49370

KEYWORDS: Microlens, Diffraction, Silicon, Microlens array, Semiconducting wafers, Photomasks, Etching, Optical alignment, Reactive ion etching, Micro optics

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Showing 5 of 29 publications

Proceedings Volume Editor (11)

SPIE Conference Volume | 2 October 2001

MOEMS and Miniaturized Systems II

SPIE Conference Volume | 22 August 2000

MOEMS and Miniaturized Systems

SPIE Conference Volume | 2 September 1999

Miniaturized Systems with Micro-Optics and MEMS

SPIE Conference Volume | 2 September 1998

Microelectronic Structures and MEMS for Optical Processing IV

SPIE Conference Volume | 15 March 1998

Miniaturized Systems with Micro-Optics and Micromechanics III

Showing 5 of 11 publications

Conference Committee Involvement (21)

SPIE MOEMS-MEMS

1 February 2014 | San Francisco, United States

SPIE MOEMS-MEMS

2 February 2013 | San Francisco, United States

SPIE MOEMS-MEMS

22 January 2011 | San Francisco, United States

SPIE MOEMS-MEMS

23 January 2010 | San Francisco, United States

SPIE MOEMS-MEMS: Micro- and Nanofabrication

24 January 2009 | San Jose, United States

MOEMS-MEMS 2008 Micro and Nanofabrication

19 January 2008 | San Jose, United States

MOEMS-MEMS Micro and Nanofabrication

22 January 2005 | San Jose, United States

Micromachining and Microfabrication

24 January 2004 | San Jose, United States

Micromachining and Microfabrication

25 January 2003 | San Jose, United States

MOEMS and Miniaturized Systems II

22 October 2001 | San Francisco, CA, United States

Micromachining and Microfabrication

21 October 2001 | San Francisco, United States

MOEMS and Miniaturized Systems

18 September 2000 | Santa Clara, CA, United States

Miniaturized Systems with Micro-Optics and MEMS

20 September 1999 | Santa Clara, CA, United States

Microelectronic Structures and MEMS for Optical Processing IV

21 September 1998 | Santa Clara, CA, United States

Miniaturized Systems with Micro-Optics and Micromechanics III

26 January 1998 | San Jose, CA, United States

Microelectronic Structures and MEMS for Optical Processing III

29 September 1997 | Austin, TX, United States

Miniaturized Systems with Microoptics and Micromechanics II

10 February 1997 | San Jose, CA, United States

Microelectronic Structures and MEMS for Optical Processing II

14 October 1996 | Austin, TX, United States

Miniaturized Systems with Micro-Optics and Micromechanics

30 January 1996 | San Jose, CA, United States

Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications

24 October 1995 | Austin, TX, United States

Micro-Optics/Micromechanics and Laser Scanning and Shaping

7 February 1995 | San Jose, CA, United States

Showing 5 of 21 Conference Committees

Course Instructor

SC237: MOEMS/MEMS Technology and Applications

This course introduces the exciting fields of Micro-optics and MEMS and reviews the synergistic role these technologies play in the emerging field of Micro-Opto-Electro-Mechanical Systems (MOEMS). This course covers this new manufacturing technology will results in high performance devices that are lighter, easier to produce, more efficient, and less expensive than conventionally produced components.

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