Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches

Long-Sun Huang; Shi-sheng Lee; M. Edward Motamedi; Ming C. Wu; Chang-Jin Kim

doi:10.1117/12.324267

2 September 1998 Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches

Long-Sun Huang, Shi-sheng Lee, M. Edward Motamedi, Ming C. Wu, Chang-Jin Kim

Author Affiliations +

Proceedings Volume 3513, Microelectronic Structures and MEMS for Optical Processing IV; (1998) https://doi.org/10.1117/12.324267
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We report optical coupling loss and vibration characterization for packaging of 2 X 2 vertical torsion mirror switches. The coupling losses of fiber-to-fiber and fiber-lens-lens-fiber are examined in order to design 2 X 2 MEMS optical switches required for the performance specification. The results indicate that the fiber-lens- lens-fiber configuration provides a over 1 mm working distance of 2.5 dB loss between the lens centers. The fiber- to-fiber only allows 175 micrometers for the same loss. In addition, the mechanical frequency response of the vertical torsion mirror is experimentally examined by electrostatic excitation. The discrepancy between the calculated and the measured nature frequencies is investigated by the study of the effect of the in-house post processes.

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Long-Sun Huang, Shi-sheng Lee, M. Edward Motamedi, Ming C. Wu, and Chang-Jin Kim "Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches", Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); https://doi.org/10.1117/12.324267

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