Common-path interference profiler with nondestructive testing of a supersmooth surface

Yongying Yang; Yongmo Zhuo; Huashan Cheng

doi:10.1117/12.318328

5 August 1998 Common-path interference profiler with nondestructive testing of a supersmooth surface

Yongying Yang, Yongmo Zhuo, Huashan Cheng

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318328
Event: Photonics China '98, 1998, Beijing, China

Abstract

The paper described a double-focus interference profiler, its characteristics as below: There isn't standard reference mirror in the instrument. Non-destructive testing is operated for surface. It will be valid for rejecting various noises using interference and electronic common-mode processing system. All measurements are carried out by computer then surface roughness parameters are displayed. The results are compared with commercial WYKO and identity is very well. The instrument is suitable for testing nanometer and sub-nanometer surface, especially soft materials and films. The instrument has a sensitivity to height of 0.1 nm and the lateral sensitivity 1 micrometers .

Citation Download Citation

Yongying Yang, Yongmo Zhuo, and Huashan Cheng "Common-path interference profiler with nondestructive testing of a supersmooth surface", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318328

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available