Fabrication and evaluation of reflective wave plate with subwavelength grating structure

Itsunari Yamada

doi:10.1117/12.2214800

27 April 2016 Fabrication and evaluation of reflective wave plate with subwavelength grating structure

Itsunari Yamada

Proceedings Volume 9888, Micro-Optics 2016; 98880P (2016) https://doi.org/10.1117/12.2214800
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

A reflective wave plate with subwavelength grating structure of the photoresist was fabricated using two-beam interference technology, and was then evaluated for phase retardation. Whereas the phase retardation of the transmission wave plate with 400 nm period, fill factor of 0.5, and 240 nm depth, respectively, was 15° at 632.8 nm wavelength, the phase retardation of the fabricated reflective element with 400 nm period, fill factor of 0.5, and 240 nm depth reached 29° for the reason that the optical length of the reflective one became twice as long as the transmissive one because of the use of reflection. By changing the period and depth to 285 nm and to 295 nm, respectively, the phase retardation of a reflective wave plate for 473 nm wavelength achieved 144° at the incident angle of 45°.

Citation Download Citation

Itsunari Yamada "Fabrication and evaluation of reflective wave plate with subwavelength grating structure", Proc. SPIE 9888, Micro-Optics 2016, 98880P (27 April 2016); https://doi.org/10.1117/12.2214800

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available