Fabrication of MEMS using liquid jet dispensing technique

Sergey S. Sarkisov; Abdalla M. Darwish; Hossin Ahmed Abdeldayem; Grigory Adamovsky; Mykola B. Kulishov; Curtis E. Banks; JaChing Wang

doi:10.1117/12.341278

10 March 1999 Fabrication of MEMS using liquid jet dispensing technique

Sergey S. Sarkisov, Abdalla M. Darwish, Hossin Ahmed Abdeldayem, Grigory Adamovsky, Mykola B. Kulishov, Curtis E. Banks, JaChing Wang

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341278
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

We describe a simple yet efficient technique of delineation of various polymer MEMS structures using computer driven liquid jet dispenser. A syringe-type dispenser with a replaceable needle is filled with a polymer solution and mounted on a vertical translation stage. The substrate is mounted on two-coordinate horizontal translation stage. Additional vertical translation arm is connected to the plunger of the syringe. Vertical translation provides positioning of the needle at a certain height over the substrate. Delineation is accomplished when the syringe plunger, being pushed down by the vertical translation arm, dispenses the liquid on the substrate at a programmable flow rate simultaneously with horizontal motion of the substrate with respect to the needle. Horizontal motion is done along a programmable trajectory at a programmable sped. Comparing to conventional methods, the proposed device consumes three order of magnitude less amount of material for the fabrication of similar MEMS structures. In addition, we describe a supplement to the liquid delineation system in the form of a microscope objective head connected to a noncoherent UV source with a multimode optical fiber. The head can serve as a tool for UV curing of the polymer material deposited with the jet dispenser as well as a separate UV writing tool. In conclusion, we describe the calculation technique for the distribution of the electric field in electrically or optically controlled ferroelectric polymer MEMS fabricated by the proposed technique.

Citation Download Citation

Sergey S. Sarkisov, Abdalla M. Darwish, Hossin Ahmed Abdeldayem, Grigory Adamovsky, Mykola B. Kulishov, Curtis E. Banks, and JaChing Wang "Fabrication of MEMS using liquid jet dispensing technique", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341278

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Liquids

Microelectromechanical systems

Polymers

Head

Ultraviolet radiation

Fabrication

Ferroelectric polymers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years