Microfabrication technique for thick structure of metals and PZT

Toru Shimizu; Yoichi Murakoshi; Zhanjie Wang; Ryutaro Maeda; Toshio Sano

doi:10.1117/12.341236

10 March 1999 Microfabrication technique for thick structure of metals and PZT

Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, Toshio Sano

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341236
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Micro fabrication techniques for thick structure are developed. One method is a micro fabrication method using injection molding. And another method is the coating method using hydro gel. First method is almost same technique which is named MIM or CIM. In the process, the powder is mixed with the binder and mixture is injection molded. the molded parts are extracted the binder using supercritical carbon dioxide, and sintered. Employing this process, micro pattern which has aspect ratio more than 5 can be molded by metal powder and PZT. In this method, a micro pattern made by laser ablation is used as a die. As compared with other micro fabrication techniques, this method can utilize the molding die repeatedly. Consequently, the producing cost of micro parts can be decreased by this method on actual production process. Second method is a technique which uses the PVA hydrogel. The powder is mixed with water which contains the PVA from 3 to 15 percent. The mixed compound is sandwiched with PE films.It is froze and a gel sheet which has thickness from 40 to 100 micrometers is obtained. Using the sheet, the ceramic and metal are coated on the Silicon wafer, and thick structure is fabricated.

Citation Download Citation

Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, and Toshio Sano "Microfabrication technique for thick structure of metals and PZT", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341236

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