Piezoresistive pressure sensors for medical applications

Inna Maryamova; Elena Lavitska; Igor Kogut; Alexey Kutrakov

doi:10.1117/12.346866

30 April 1999 Piezoresistive pressure sensors for medical applications

Inna Maryamova, Elena Lavitska, Igor Kogut, Alexey Kutrakov

Proceedings Volume 3730, Optoelectronic and Electronic Sensors III; (1999) https://doi.org/10.1117/12.346866
Event: Optoelectronic and Electronic Sensors III, 1998, Jurata, Poland

Abstract

Miniature high-sensitive pressure sensors on the basis of semiconductor whiskers and laser recrystallized SOI layers have been developed. Design examples of the sensors and some devices for medical purpose are presented.

Citation Download Citation

Inna Maryamova, Elena Lavitska, Igor Kogut, and Alexey Kutrakov "Piezoresistive pressure sensors for medical applications", Proc. SPIE 3730, Optoelectronic and Electronic Sensors III, (30 April 1999); https://doi.org/10.1117/12.346866

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