Rotating Scan Interferometer

Peter Langenbeck

doi:10.1117/12.935258

26 October 1983 Rotating Scan Interferometer

Peter Langenbeck

Proceedings Volume 0396, Advances in Laser Scanning and Recording; (1983) https://doi.org/10.1117/12.935258
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Centration, tilt and offset of spheric and of aspheric surfaces are detected by an interferometer with a zonal rotary scan by means of a precise air bearing spindle thus providing the topography of the sample.

Citation Download Citation

Peter Langenbeck "Rotating Scan Interferometer", Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); https://doi.org/10.1117/12.935258

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available