Effect of PbO-coated layer on the microstructure and electrical properties of sol-gel-derived PZT thin films

Jinglan Sun; Xiangjian Meng; L. X. Bo; Zhixun Ma; Zhiming Huang; Shaoling Guo; Junhao Chu

doi:10.1117/12.408355

29 November 2000 Effect of PbO-coated layer on the microstructure and electrical properties of sol-gel-derived PZT thin films

Jinglan Sun, Xiangjian Meng, L. X. Bo, Zhixun Ma, Zhiming Huang, Shaoling Guo, Junhao Chu

Author Affiliations +

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408355
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Highly (100)-oriented lead zirconate titanate Pb(Zr_0.52Ti_0.48)O₃ thin films with and without a PbO- coated layer were prepared on LaNiO₃ (LNO)-coated silicon substrates by a simple sol-gel process. X-ray diffraction and atomic force microscope were applied to study the microstructure of the films. The ferroelectric and fatigue properties were measured by a RT66A system. An infrared spectroscopic ellipsometer was used to determine the thickness of the thin films. The leakage current density (J-t) was carried out with a Keithley 617 programmable electrometer. All measurements were conducted on a Pt-PZT- LNO capacitor structure. It was observed that the PbO-coated layer has no effect on the texture of the PZT thin films while it leads to a great improvement in the surface morphology. The results indicated that samples with a PbO- coated layer show higher remnant polarization and lower coercive field (18.6 (mu) C/cm² and 58.5 kV/cm) than that of samples without PbO-coated layer. After 10⁸ switching cycles, the net-switched polarization for the film with a PbO-coated layer does not show any drop.

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Jinglan Sun, Xiangjian Meng, L. X. Bo, Zhixun Ma, Zhiming Huang, Shaoling Guo, and Junhao Chu "Effect of PbO-coated layer on the microstructure and electrical properties of sol-gel-derived PZT thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408355

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