Erbium-induced reconstructions on silicon (100) substrate

G. R. Chen; D. W. Gong; Jianhua Liu; Yu Fu; Zhong Huang; Ling Ye

doi:10.1117/12.408438

29 November 2000 Erbium-induced reconstructions on silicon (100) substrate

G. R. Chen, D. W. Gong, Jianhua Liu, Yu Fu, Zhong Huang, Ling Ye

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408438
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Ultra-thin erbium layers are formed on Si(100) substrate by depositing 0.5 approximately 3 ML Er atoms in an ultra-high vacuum system. The films deposited at room temperature are in the amorphous form. After annealing at low temperatures, ordered structures form on the surface. The surface reconstruction is studied by in situ reflection high energy electron diffraction (RHEED). The transition of the RHEED patterns from (2X1) to (4X2) is observed with the increase of Er coverage up to 1 monolayers after low temperature annealing. Several cluster models are adopted for simulating Er adatoms located at different sites on Si(100) substrate to determine the favorable surface geometry. The first principle discrete variational cluster method based on ab initio local density approximation is used to calculate the total energies of different surface configurations.

Citation Download Citation

G. R. Chen, D. W. Gong, Jianhua Liu, Yu Fu, Zhong Huang, and Ling Ye "Erbium-induced reconstructions on silicon (100) substrate", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408438

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available