Overview of laser microprocessing: fundamentals, practical applications, and future prospects

Vadim P. Veiko

doi:10.1117/12.405694

6 November 2000 Overview of laser microprocessing: fundamentals, practical applications, and future prospects

Vadim P. Veiko

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405694
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

Today the laser technologies are widely used in the processing of materials, including also the precise micro shaping. Deep UV lasers have very good prospects in the lithography, used for fabrication of chips, while the femtosecond pused lasers open the new horizons for the micro- and submicroprofiling. But these are the field of the future prospects. As for today state-of-the-art, contribution to the application of lasers for these purposes are the numerous advantages of the laser techniques over the traditional methods, such as: - wide variety of materials to be treated, - possibility of achieving narrow cuts and practically waste-fee separation, - small heat-affected zone, - minimal mechanical effect and minimum thermal deformations, - possibility of micro shaping along a complex profile in two, or even three, dimensions, - possibility of fast and precise process switch-on and off and to include in the processing feedback on the treated parameters.

Citation Download Citation

Vadim P. Veiko "Overview of laser microprocessing: fundamentals, practical applications, and future prospects", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405694

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available