Protective coatings for Al metallizations obtained by plasma polymerization

Jaume Esteve; Francesc Benitez; Salvador Bosch; Elena Martinez; Miquel Galan; Jordi Serrat

doi:10.1117/12.404758

19 October 2000 Protective coatings for Al metallizations obtained by plasma polymerization

Jaume Esteve, Francesc Benitez, Salvador Bosch, Elena Martinez, Miquel Galan, Jordi Serrat

Proceedings Volume 4094, Optical and Infrared Thin Films; (2000) https://doi.org/10.1117/12.404758
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Plasma polymerized hexamethyldisiloxane (PP-HMDSO) thin films have been obtained in a DC glow discharge from oxygen/HMDSO gas mixtures. Such films are successfully applied to the pr otection of Al metallisations on plastic substrates. The composition of the films (SiO_xC_y:H) may be varied from organic (polymer-like) to inorganic (SiO₂-like) by varying the oxygen-to-monomer ration in the precursor gas mixture. The structural and functional properties of the films are studied as a function of the plasma parameters.

Citation Download Citation

Jaume Esteve, Francesc Benitez, Salvador Bosch, Elena Martinez, Miquel Galan, and Jordi Serrat "Protective coatings for Al metallizations obtained by plasma polymerization", Proc. SPIE 4094, Optical and Infrared Thin Films, (19 October 2000); https://doi.org/10.1117/12.404758

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