Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view

Thomas Rinder; Hendrik Rothe; Andre Kasper

doi:10.1117/12.401653

26 September 2000 Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view

Thomas Rinder, Hendrik Rothe, Andre Kasper

Author Affiliations +

Proceedings Volume 4100, Scattering and Surface Roughness III; (2000) https://doi.org/10.1117/12.401653
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

This paper deals with applications of angle resolved light scatter (ARS) measurements as well as with the discussion of design and application problems of ARS sensors. The first section gives a description of the experimental sensor setup. In the second section of the paper two applications will be outlined, firstly particle detection on smooth Si surfaces, and secondly defect detection in small Si v-grooves. In the third section of the paper principal drawbacks of the experimental ARS sensor and their elimination will be discussed.

Citation Download Citation

Thomas Rinder, Hendrik Rothe, and Andre Kasper "Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view", Proc. SPIE 4100, Scattering and Surface Roughness III, (26 September 2000); https://doi.org/10.1117/12.401653

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