Performance limits of ARS sensor based on CMOS photodiode array

Thomas Rinder; Hendrik Rothe

doi:10.1117/12.451738

11 November 2002 Performance limits of ARS sensors based on CMOS photodiode array

Thomas Rinder, Hendrik Rothe

Proceedings Volume 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components; (2002) https://doi.org/10.1117/12.451738
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Measuring the light scatter back from a coherently illuminated surface is a powerful and fast measurement method to observe surfaces and its properties. It opens the possibility to measure integral surface topography constants, material properties, surface defects and contamination. In this paper the performance limits of the angle resolved light scatter sensor (ARS sensor) LARISSA (Large Dynamic Range Intelligent Scatter Sensor Approach) will be discussed and exemplified by using a technical application. In the first part of the paper the experimental setup of the ARS sensor LARISSA will be considered. In the second part of the paper the performance limitation of the ARS sensor LARISSA concerning particle detection will be derived based on simulation and measurement results. Finally a short overview is given about further development of the ARS sensor.

Citation Download Citation

Thomas Rinder and Hendrik Rothe "Performance limits of ARS sensors based on CMOS photodiode array", Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); https://doi.org/10.1117/12.451738

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