Silicon components for gas chromatograph

Jan Dziuban; Anna Gorecka-Drzazga; Krzysztof Malecki; Lukasz Nieradko; Jerzy Mroz; Malgorzata Szczygielska

doi:10.1117/12.435932

8 August 2001 Silicon components for gas chromatograph

Jan Dziuban, Anna Gorecka-Drzazga, Krzysztof Malecki, Lukasz Nieradko, Jerzy Mroz, Malgorzata Szczygielska

Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435932
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland

Abstract

A gas analyzer based on chromatography method using silicon- glass components has been built. Its main components were made by using MAMS-like technology, and its conception is concurrent to the idea of an integrated silicon chromatography proposed by SC Terry.

Citation Download Citation

Jan Dziuban, Anna Gorecka-Drzazga, Krzysztof Malecki, Lukasz Nieradko, Jerzy Mroz, and Malgorzata Szczygielska "Silicon components for gas chromatograph", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435932

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