Paper
7 February 2002 Photonic crystals for narrow-band infrared emission
Author Affiliations +
Proceedings Volume 4574, Instrumentation for Air Pollution and Global Atmospheric Monitoring; (2002) https://doi.org/10.1117/12.455159
Event: Environmental and Industrial Sensing, 2001, Boston, MA, United States
Abstract
MEMS silicon (Si) micro-bridge elements, with photonic band gap (PBG) modified surfaces are exploited for narrow-band spectral tuning in the infrared wavelength regime. Thermally isolated, uniformly heated single crystal Si micro-heaters would otherwise provide gray-body emission, in accordance with Planck's distribution function. The introduction of an artificial dielectric periodicity in the Si, with a surface, vapor-deposited gold (Au) metal film, governs the photonic frequency spectrum of permitted propagation, which then couples with surface plasmon states at the metal surface. Narrow band spectral tuning was accomplished through control of symmetry and lattice spacing of the PBG patterns. Transfer matrix calculations were used to model the frequency dependence of reflectance for several lattice spacings. Theoretical predictions that showed narrow-band reflectance at relevant wavelengths for gas sensing and detection were then compared to measured reflectance spectra from processed devices. Narrow band infrared emission was confirmed on both conductively heated and electrically driven devices.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martin U. Pralle, Mark P. McNeal, Nicholas Moelders, Lisa Last, William Ho, Anton C. Greenwald, James T. Daly, Irina Puscasu, Edward A. Johnson, Ihab El-Kady, and Rana Biswas "Photonic crystals for narrow-band infrared emission", Proc. SPIE 4574, Instrumentation for Air Pollution and Global Atmospheric Monitoring, (7 February 2002); https://doi.org/10.1117/12.455159
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KEYWORDS
Reflectivity

Silicon

Infrared radiation

Metals

Absorption

Microelectromechanical systems

Sensors

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