Characterization of cylindrical lenses with the help of grazing incidence interferometry for micro- and macro-optics

Johannes Schwider; Norbert Lindlein; Klaus Mantel; Roland Schreiner

doi:10.1117/12.524582

19 November 2003 Characterization of cylindrical lenses with the help of grazing incidence interferometry for micro- and macro-optics

Johannes Schwider, Norbert Lindlein, Klaus Mantel, Roland Schreiner

Author Affiliations +

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.524582
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

The cylinder geometry allows for grazing incidence tests of optical surfaces let it be micro- or macro cylinder lenses. By using diffractive beam splitter and beam shaping elements a grazing incidence interferometer can be built where the zero diffraction order is used as reference beam and one of the first orders as probe beam for the cylinder surface. Circular as well as noncircular meridian curves can be dealt with by shaping the DOE structure accordingly. The structure of the DOE are parallel curves to the meridian providing a constant spatial frequency which alleviates the lithographic process. The fringes indicate surface deviations from fringe to fringe by p/2 where p is the pitch of the DOE. A description of a micro- and a macro-interferometer together with measuring results will be given.

Citation Download Citation

Johannes Schwider, Norbert Lindlein, Klaus Mantel, and Roland Schreiner "Characterization of cylindrical lenses with the help of grazing incidence interferometry for micro- and macro-optics", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.524582

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