Microcavities elaborated by sol-gel process

Joel Bellessa; Sebastien Rabaste; Jean-Claude Plenet; Jacques Mugnier

doi:10.1117/12.476272

3 April 2003 Microcavities elaborated by sol-gel process

Joel Bellessa, Sebastien Rabaste, Jean-Claude Plenet, Jacques Mugnier

Proceedings Volume 4944, Integrated Optical Devices: Fabrication and Testing; (2003) https://doi.org/10.1117/12.476272
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

The fabrication and the optical properties of sol-gel high quality DBRs and microcavities are described and the emission of the europium ions included in the cavity observed. The microcavities are constituted of an SiO₂ half wave Eu³⁺ doped active layer inserted between two sol-gel Bragg reflectors. These reflectors are formed by a stack of alternated quarter wave films of SiO₂ and TiO₂. Films were deposited by a dip coating method. To fabricate high quality Bragg mirrors, a large number of layers has to be stacked, but sol gel thin layers develop internal stresses during the drying and firing processes, leading to defects and cracks into the stacked films. The study of the stresses in the layers shows that a short 900°C layer annealing solves this problem and the number of stacked layers can be greater than 60 without cracks. A microcavity with 7 doublets Bragg mirrors has been fabricated using this process. Eu³⁺ luminescence modification due to the cavity effect, intensity enhancement and modification of the lineshape, has been observed, showing a cavity quality factor of 1200. The reflectivity factor of the associated Bragg mirrors reaches 99.8% for seven alternated SiO₂/TiO₂ layers.

Citation Download Citation

Joel Bellessa, Sebastien Rabaste, Jean-Claude Plenet, and Jacques Mugnier "Microcavities elaborated by sol-gel process", Proc. SPIE 4944, Integrated Optical Devices: Fabrication and Testing, (3 April 2003); https://doi.org/10.1117/12.476272

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