Preparation and properties of AgOx films for LSC-super-RENS

Yuepin Zhang; Xianying Wang; Hao Ruan; Defang Shen; Fuxi Gan

doi:10.1117/12.510267

9 April 2003 Preparation and properties of AgO_x films for LSC-super-RENS

Yuepin Zhang, Xianying Wang, Hao Ruan, Defang Shen, Fuxi Gan

Proceedings Volume 5060, Sixth International Symposium on Optical Storage (ISOS 2002); (2003) https://doi.org/10.1117/12.510267
Event: Sixth International Symposium on Optical Storage (ISOS 2002), 2002, Wuhan, China

Abstract

In this paper AgO_x films for super resolution near-field structure application were prepared by reactive sputtering. The switching properties of AgO_x films were studied by analyzing the relationship between the transmittance and the laser power. We gained results that AgO_x films had excellent switching properties and the reaction (formula available in paper) was reversible. The structures of AgO_x films were investigated by X-ray diffraction and TEM.

Citation Download Citation

Yuepin Zhang, Xianying Wang, Hao Ruan, Defang Shen, and Fuxi Gan "Preparation and properties of AgO_x films for LSC-super-RENS", Proc. SPIE 5060, Sixth International Symposium on Optical Storage (ISOS 2002), (9 April 2003); https://doi.org/10.1117/12.510267

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