UV-laser assisted fabrication of dispersive structures in polymeric integrated-optical components

Carsten Wochnowski; Simeon Metev; Krassimira Meteva; Frank Vollertsen

doi:10.1117/12.540767

18 November 2003 UV-laser assisted fabrication of dispersive structures in polymeric integrated-optical components

Carsten Wochnowski, Simeon Metev, Krassimira Meteva, Frank Vollertsen

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540767
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

In this article the fabrication of grating structures in the surface of planar polymer chips by the phase mask method is discussed. By this way surface relief gratings (SRG) and bragg-structures can be generated by UV-laser irradiation. Especially the topographical surface properties of the gratings have been examined. Potential applications are the field of optical sensor and information technology.

Citation Download Citation

Carsten Wochnowski, Simeon Metev, Krassimira Meteva, and Frank Vollertsen "UV-laser assisted fabrication of dispersive structures in polymeric integrated-optical components", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540767

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