UV-laser assisted fabrication of integrated-optical Bragg sensor components in a planar polymer chip

Carsten Wochnowski; Michael Koerdt; Simeon Metev; Frank Vollertsen

doi:10.1117/12.596301

8 October 2004 UV-laser-assisted fabrication of integrated-optical Bragg sensor components in a planar polymer chip

Carsten Wochnowski, Michael Koerdt, Simeon Metev, Frank Vollertsen

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596301
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

By UV-laser irradiation the refractive index of some polymers can be locally increased in a controllable way. So by mask lithographic methods integrated-optical waveguiding and dispersive structures can be generated in the surface of a planar polymer chip. Thus a polymeric Bragg-sensor component in integrated-optical form was fabricated by the UV-light of an excimer laser. The surface morphology and optical-functional properties of the polymeric Bragg sensor component have been examined especially in dependence on the irradiation parameters and the temperature. The investigations yield the suitability of the Bragg-sensor for the measurements of temperature and deformation. For the realization of a passive fiber-chip coupling for the integrated-optical components a new technology has been developed and tested. The precise control and high-resolution ablation capability inherent in excimer laser machining make it ideally suited for creating grooves for passive alignment of optical fibers to planar channel waveguides.

Citation Download Citation

Carsten Wochnowski, Michael Koerdt, Simeon Metev, and Frank Vollertsen "UV-laser-assisted fabrication of integrated-optical Bragg sensor components in a planar polymer chip", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596301

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