Comparison between conductometric and layered SAW hydrogen gas sensor

Samuel James Ippolito; Sasikaran Kandasamy; Kourosh Kalantar-zadeh; Wojtek Wlodarski; Anthony Holland

doi:10.1117/12.522224

30 March 2004 Comparison between conductometric and layered SAW hydrogen gas sensor

Samuel James Ippolito, Sasikaran Kandasamy, Kourosh Kalantar-zadeh, Wojtek Wlodarski, Anthony Holland

Author Affiliations +

Proceedings Volume 5274, Microelectronics: Design, Technology, and Packaging; (2004) https://doi.org/10.1117/12.522224
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

A comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an R.F. magnetron sputtered tungsten trioxide (WO₃) thin film as a selective layer for hydrogen (H₂) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO₃ substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and various concentrations of H₂ in synthetic air.

Citation Download Citation

Samuel James Ippolito, Sasikaran Kandasamy, Kourosh Kalantar-zadeh, Wojtek Wlodarski, and Anthony Holland "Comparison between conductometric and layered SAW hydrogen gas sensor", Proc. SPIE 5274, Microelectronics: Design, Technology, and Packaging, (30 March 2004); https://doi.org/10.1117/12.522224

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