MEMS-based method of polymer bead handling for chemical array sensors

Byunghwa Park; Yoon S. Park; Jun Wan Kim; Young-Soo Sohn; Dean P. Neikirk

doi:10.1117/12.608742

1 July 2005 MEMS-based method of polymer bead handling for chemical array sensors

Byunghwa Park, Yoon S. Park, Jun Wan Kim, Young-Soo Sohn, Dean P. Neikirk

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608742
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Combination of micromachined platforms and chemically sensitive micro-beads have been demonstrated for use as multi-analyte chemical and biological agent detectors [1,2]. In many of these systems agarose beads have been used as the "container" of various chemical sensors and enzymes. This paper discusses a method of array assembly using such sub-millimeter size beads.

Citation Download Citation

Byunghwa Park, Yoon S. Park, Jun Wan Kim, Young-Soo Sohn, and Dean P. Neikirk "MEMS-based method of polymer bead handling for chemical array sensors", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608742

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