Paper
18 August 2005 CVC silicon carbide optical properties and systems
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Abstract
The chemical vapor composites (CVC) process provides for the rapid manufacture of near net shape, reduced residual stress silicon carbide (SiC) suitable for high performance optics. The reduction or elimination of residual stress provides several key advantages: 1) increased growth rate, 2) high yields, and 3) near net shape deposition of complex geometries. Near net shape deposition allows for fabrication of spherical and aspherical optics without machining of the optical surface. Final surface figures of optical flats are typically better than 1/10λ (P-V) and 2-5Å surface roughness. A comparison of ultraviolet spectrum reflectance of CVC SiC and that of single crystal SiC is discussed. The complex optical constants of CVC SiC in the mid-infrared spectrum are also presented.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Colby A. Foss Jr. "CVC silicon carbide optical properties and systems", Proc. SPIE 5868, Optical Materials and Structures Technologies II, 586806 (18 August 2005); https://doi.org/10.1117/12.613944
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Cited by 3 scholarly publications.
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KEYWORDS
Silicon carbide

Mirrors

Reflectivity

Solids

Optical properties

Polishing

Ultraviolet radiation

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