Measurement of surface details with nanometer resolution using several optically held probes

Petr Jákl; Mojmír Šerý; Miroslav Liška; Pavel Zemánek

doi:10.1117/12.675862

18 April 2006 Measurement of surface details with nanometer resolution using several optically held probes

Petr Jákl, Mojmír Šerý, Miroslav Liška, Pavel Zemánek

Proceedings Volume 6180, Photonics, Devices, and Systems III; 61802A (2006) https://doi.org/10.1117/12.675862
Event: Photonics, Devices, and Systems III, 2005, Prague, Czech Republic

Abstract

Scanning probe microscopy with multiple optically held probes is presented. Acousto-optical deflectors are employed to rapidly switch the optical trap between two positions so that the trapped probes are not allowed to leave the trap region. The probes are fluorescently labelled and their vertical position is acquired from the level of two-photon fluorescence. This particle position detection technique is very sensitive and allows obtaining surface details with resolution better than 10 nm. Using two probes simultaneously accelerates the measurement process and allows scanning of larger regions.

Citation Download Citation

Petr Jákl, Mojmír Šerý, Miroslav Liška, and Pavel Zemánek "Measurement of surface details with nanometer resolution using several optically held probes", Proc. SPIE 6180, Photonics, Devices, and Systems III, 61802A (18 April 2006); https://doi.org/10.1117/12.675862

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