A simple technique for defining the structure and the dimensional parameters of layered specimens

N. Dreomova

doi:10.1117/12.693190

31 May 2006 A simple technique for defining the structure and the dimensional parameters of layered specimens

N. Dreomova

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780P (2006) https://doi.org/10.1117/12.693190
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

Scanning electron microscope, equipped with EDAX module, can be used as an analytical device for studying the microelectronic structures, among which the multilayered objects represent a large part of the specimens under study. Three types of signals are registered with this method - secondary electrons (SE), hackscattered electrons (BSE) and x-ray radiation yield (X-ray) - providing the useful information about a specimen tested.

Citation Download Citation

N. Dreomova "A simple technique for defining the structure and the dimensional parameters of layered specimens", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780P (31 May 2006); https://doi.org/10.1117/12.693190

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