Vision feedback in an automatic nanohandling station inside an SEM

Torsten Sievers; Marco Jähnisch; Christian Schrader; Sergej Fatikow

doi:10.1117/12.684178

13 October 2006 Vision feedback in an automatic nanohandling station inside an SEM

Torsten Sievers, Marco Jähnisch, Christian Schrader, Sergej Fatikow

Proceedings Volume 6376, Optomechatronic Micro/Nano Devices and Components II; 63760B (2006) https://doi.org/10.1117/12.684178
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

In this paper, two image processing approaches are presented, which are used to gain vision feedback for automatic nanohandling inside a Scanning Electron Microscope (SEM). The first one is a vision-based force measurement that makes use of an active contours tracking algorithm for real-time tracking of the bending line of micro- and nanoobjects. With this algorithm, it is possible to calculate applied forces in real-time with respect to the image acquisition time. This approach is validated using a piezo-resistive force sensor. In a second experiment the force applied to a Si nanowire (d ≈ 470 nm) is measured. The second visual measurement approach deals with the calculations of depth information inside an SEM by means of stereoscopic images. Therefore, a new 3D-imaging system that uses a stereo algorithm based on a biologically motivated energy model is proposed. The system provides a sharp and high density disparity map in sub-pixel accuracy and a 3D-plot for the user.

Citation Download Citation

Torsten Sievers, Marco Jähnisch, Christian Schrader, and Sergej Fatikow "Vision feedback in an automatic nanohandling station inside an SEM", Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 63760B (13 October 2006); https://doi.org/10.1117/12.684178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available