CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback

Daniel Jasper; Sergej Fatikow

doi:10.1117/12.754585

8 October 2007 CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback

Daniel Jasper, Sergej Fatikow

Proceedings Volume 6719, Optomechatronic Systems Control III; 67190M (2007) https://doi.org/10.1117/12.754585
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

This paper presents a nanohandling robot cell with flexible visual feedback designed to work inside an SEM's vacuum chamber in order to support teleoperated and fully automated nanohandling. Rail-based robots position miniature video microscopes that observe the handling from different angles and with different magnifications. Image processing techniques can be used to recognize and track objects and three-dimensional information can be obtained by stereo vision and by the microscope's focus. The feasibility and advantages of the CameraMan concept are analyzed by the implementation of a robot cell prototype. A self-learning controller is used to control the non-linear parts of the system, challenges for cooperatively controlling the multi-robot system are outlined and high-level automation is discussed.

Citation Download Citation

Daniel Jasper and Sergej Fatikow "CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback", Proc. SPIE 6719, Optomechatronic Systems Control III, 67190M (8 October 2007); https://doi.org/10.1117/12.754585

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