Reflectance and fluorescence imaging with a MEMS dual–axes confocal microscope

Hyejun Ra; Wibool Piyawattanametha; Yoshihiro Taguchi; Olav Solgaard

doi:10.1117/12.711560

22 January 2007 Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Olav Solgaard

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660G (2007) https://doi.org/10.1117/12.711560
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm x 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

Citation Download Citation

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, and Olav Solgaard "Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660G (22 January 2007); https://doi.org/10.1117/12.711560

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KEYWORDS

Microelectromechanical systems

Mirrors

Scanners

Luminescence

Reflectivity

Confocal microscopy

Microscopes

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