AlGaN/GaN multiple quantum wells grown by atomic layer deposition

M. H. Lo; Z. Y. Li; J. R. Chen; T. S. Ko; T. C. Lu; H. C. Kuo; S. C. Wang

doi:10.1117/12.762158

15 February 2008 AlGaN/GaN multiple quantum wells grown by atomic-layer deposition

M. H. Lo, Z. Y. Li, J. R. Chen, T. S. Ko, T. C. Lu, H. C. Kuo, S. C. Wang

Proceedings Volume 6894, Gallium Nitride Materials and Devices III; 68941V (2008) https://doi.org/10.1117/12.762158
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

A three-pair AlGaN/GaN multiple quantum well (MQW) structure with superlattices (SLs) was grown on c-plane sapphire using metal organic chemical vapor deposition (MOCVD) system. The AlGaN barrier and GaN well of the MQW structure were grown by atomic layer deposition (ALD) and conventional growth, respectively. The HRTEM and HRXRD results show the grown structure has shape interface between SLs layers and QWs with good periodicity. The AFM and SEM data show smooth surface morphology with low RMS value and low defect density. The CL measurements also indicate uniform luminescence pattern at room temperature. The AlGaN/GaN MQW with AlN/GaN SLs structure grown by ALD could be used to improve the surface morphology by effectively suppress the threading dislocation.

Citation Download Citation

M. H. Lo, Z. Y. Li, J. R. Chen, T. S. Ko, T. C. Lu, H. C. Kuo, and S. C. Wang "AlGaN/GaN multiple quantum wells grown by atomic-layer deposition", Proc. SPIE 6894, Gallium Nitride Materials and Devices III, 68941V (15 February 2008); https://doi.org/10.1117/12.762158

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available