Thermal and optical characterization of collectors integrated in a Sn-DPP based SoCoMo

Giovanni Bianucci; Adam Brunton; Gian Luca Cassol; Giorgio Pirovano; Fabio Zocchi; Arnaud Mader; Oliver Franken; Klaus Bergmann; Hans Scheuermann; Peter Zink

doi:10.1117/12.772977

20 March 2008 Thermal and optical characterization of collectors integrated in a Sn-DPP based SoCoMo

Giovanni Bianucci, Adam Brunton, Gian Luca Cassol, Giorgio Pirovano, Fabio Zocchi, Arnaud Mader, Oliver Franken, Klaus Bergmann, Hans Scheuermann, Peter Zink

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 692112 (2008) https://doi.org/10.1117/12.772977
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

The paper presents the results of an investigation into the thermal and optical characteristics of alpha-type dual-mirror grazing incidence collectors for Extreme Ultra-violet Lithography integrated into a tin-fueled discharge produced plasma source. The performance of the system is assessed at various power levels and temperature conditions. The thermal and the optical data, in particular images at extra-focal planes behind the intermediate focus, are compared to the predictions of the thermo-optical model of the system. The data we present provide verification of the models used to design the collector and validation of the thermo-optical modeling approach for design of future generations of collectors.

Citation Download Citation

Giovanni Bianucci, Adam Brunton, Gian Luca Cassol, Giorgio Pirovano, Fabio Zocchi, Arnaud Mader, Oliver Franken, Klaus Bergmann, Hans Scheuermann, and Peter Zink "Thermal and optical characterization of collectors integrated in a Sn-DPP based SoCoMo", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 692112 (20 March 2008); https://doi.org/10.1117/12.772977

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