Utilization of the Scheimpflug-principle in scatterometer design

Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.794939

29 August 2008 Utilization of the Scheimpflug-principle in scatterometer design

Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 7065, Reflection, Scattering, and Diffraction from Surfaces; 706507 (2008) https://doi.org/10.1117/12.794939
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

In previous papers the basic problem of imaging the scatter distribution of an aperture by means of catadioptrical scatterometrical devices has been shown to be reducible to the imaging of the caustic of the--preferably elliptical--mirror used as primary element. In an geometrical-optical approach this caustic is the object to be mapped onto a planar sensor by a secondary imaging optical device. Since the caustic is not a plane object, care has to be taken for the field of depth of the secondary optics. While in symmetrical alignments the caustic's area of interest is usually flat enough to be treated as a plane perpendicular to the optical axis, in so called off-axis devices the violation of the conditions known as Scheimpflug- and Hinge-principles become remarkable. Similar problems occur with the primary aperture image in dioptrical devices. The current paper deals with an extended geometrical-optical approach to non-goniometric scatterometer design, suitable for highly unsymmetrical and off-axis devices.

Citation Download Citation

Cornelius Hahlweg and Hendrik Rothe "Utilization of the Scheimpflug-principle in scatterometer design", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 706507 (29 August 2008); https://doi.org/10.1117/12.794939

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available