Results from the KLA-Tencor TeraScanXR reticle inspection tool

Aditya Dayal; Bo Mu; Venkat Iyer; Phillip Lim; Arosha Goonesekera; Bill Broadbent

doi:10.1117/12.801831

17 October 2008 Results from the KLA-Tencor TeraScanXR reticle inspection tool

Aditya Dayal, Bo Mu, Venkat Iyer, Phillip Lim, Arosha Goonesekera, Bill Broadbent

Proceedings Volume 7122, Photomask Technology 2008; 71223G (2008) https://doi.org/10.1117/12.801831
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

The new TeraScanXR reticle inspection system extends the capability of the previous TeraScanHR platform to advanced 32nm logic and 40nm Half Pitch (HP) memory technology nodes. The TeraScanXR has been designed to provide a significant improvement in image quality, defect sensitivity and throughput relative to the HR platform. Defect sensitivity is increased via a combination of improved Die-to-Die (D:D) and Die-to-Database (D:DB) algorithms, as well as enhancements to the image auto-focus (IAF). Modifications to system optics and the introduction of a more powerful image processing computer have enabled a ~2X faster inspection mode. In this paper, we describe the key features of the TeraScanXR platform and present preliminary data that illustrate the capability of this tool. TeraScanHR tools currently at customer sites are field-upgradeable to the TeraScanXR configuration.

Citation Download Citation

Aditya Dayal, Bo Mu, Venkat Iyer, Phillip Lim, Arosha Goonesekera, and Bill Broadbent "Results from the KLA-Tencor TeraScanXR reticle inspection tool", Proc. SPIE 7122, Photomask Technology 2008, 71223G (17 October 2008); https://doi.org/10.1117/12.801831

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