Paper
4 December 2012 Characterization of scratches on fused silica optics and a way to remove them
Author Affiliations +
Abstract
Various scratches on fused silica optics after polishing have been characterized with confocal microscopy and then tested with nanosecond UV laser. Scratches are identified as a major contributor to laser damage even if they are only a few micrometers wide. We propose a process in order to remove these scratches whose depth ranges from 2 to 16 μm. We use a CO2 laser to heat the scratched areas at high temperature which will heal fractures due to viscous flow. The characterizations were completed by laser damage tests that finally prove the effectiveness of the repair. We conclude also that this repair process proves to be fast, localized to the scratch and clean because no debris are generated.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Cormont, T. Corbineau, Laurent Gallais, C. Hecquet, Laurent Lamaignère, and J. L. Rullier "Characterization of scratches on fused silica optics and a way to remove them", Proc. SPIE 8530, Laser-Induced Damage in Optical Materials: 2012, 853026 (4 December 2012); https://doi.org/10.1117/12.976839
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Laser induced damage

Silica

Confocal microscopy

Carbon dioxide lasers

Polishing

Microscopes

UV optics

Back to Top