Paper
30 December 1976 Laser Personalization Of Integrated Circuits
S. E. Schuster, P. W. Cook
Author Affiliations +
Abstract
The use of nanosecond dye laser pulses to form low resistance reliable ohmic contacts between conductors on integrated circuit chips after fabrication is described. Possible applications which show the potential importance of this process to integrated circuit personalization are discussed.
© (1976) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. E. Schuster and P. W. Cook "Laser Personalization Of Integrated Circuits", Proc. SPIE 0086, Industrial Applications of High Power Laser Technology, (30 December 1976); https://doi.org/10.1117/12.954967
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Integrated circuits

Semiconducting wafers

Aluminum

Resistance

Silicon

Dye lasers

Microscopes

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